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Design, fabrication, control, and programming of MEMS micro-robots.

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Call No.	Ph.D. 2005
Author	McGray, Craig.
Title	Design, fabrication, control, and programming of MEMS micro-robots.
Date	2005
Abstract	This thesis presents technologies for the design, fabrication, operation, and control of electrostatic MEMS micro-robots. It describes prototype micro-robots, with dimensions of 60 μm by 250 μm by 10 μm, that are capable of controllable traversals through an { x, y, [straight theta]} configuration space. These devices operate on an electrified substrate that broadcasts a power and control signal to all possible device locations. In this way, the devices can be operated open-loop, without knowledge of their position or orientation. All sub-systems on each device receive this same power and control signal. These individual sub-systems decode the signal differently, so that multiple components on each device can be operated independently. This thesis explains how to design micro-robots so that all of their sub-systems are independently controllable, and presents algorithms for constructing the electrical signals required to produce each desired behavior of the system as a whole. It describes surface micromachining techniques for fabrication of these micro-robots, and presents performance data on their operation.
Description	ix,115 leaves : ill. 28 cm.
Format	application/pdf
Advisor	Bruce Donald, Daniele Rus
Subject	Microelectromechanical systems. Robotics.
College	Dartmouth College -- Department of Computer Science.
Issuing Body	Dartmouth Dissertations are made available through the Dartmouth Digital Library.
Degree	Thesis (Ph.D.)--Dartmouth College.
Copyright	All rights reserved. No part of this book may be reproduced in any form by any electronic or mechanical means without permission in writing from the author.
DOI	http://dx.doi.org/10.1349/ddlp.83

Title	Page 1
Format	application/pdf
Issuing Body	Dartmouth Dissertations are made available through the Dartmouth Digital Library.
Degree	Thesis (Ph.D.)--Dartmouth College.
Full Text	Design, Fabrication, Control, and Programming of MEMS Micro-Robots A dissertation submitted to the faculty in partial fulfillment of the requirements for the degree of Doctor of Philosophy by Craig McGray Computer Science Department Dartmouth College Hanover, New Hampshire 03755 June 2, 2005 Examining Committee: (Co-Chair) Bruce Donald (Co-Chair) Daniela Rus Devin Balkcom Karl B¨ohringer Christopher Levey Charles K. Barlowe Dean of Graduate Studies

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